Our components are resistant to the most common etching gases used in semiconductor manufacturing, including hydrofluoric acid (HF), hydrochloric acid (HCl), hydrogen bromide (HBr), ammonia (NH₃), and many others. For particularly aggressive applications, we recommend PVDF materials.
Ultra-clean exhaust systems for semiconductor manufacturing in chip production
Particle-free, corrosion-resistant ventilation technology for the most demanding cleanroom requirements
The semiconductor industry places the most extreme demands on purity, corrosion resistance, and particle-free operation. Aggressive etching gases such as HF, HCl, or HBr would destroy metal piping systems in no time, while even the smallest particles or metal ions can lead to wafer defects. Beck components made of PPs-el and PVDF offer you maximum corrosion resistance, extremely smooth surfaces without particle emission, and flow-optimized geometries for the high exhaust air flow rates in fabs and cleanrooms.
Contact usUnparalleled corrosion resistance and purity
Maximum corrosion resistance against aggressive process exhaust air. Highly corrosive etching
and process gases are generated during semiconductor manufacturing; Beck molded parts made of PPs-el remain permanently stable under these conditions, while metal pipe systems fail quickly. Our PVDF components, in particular, offer superior resistance to the most aggressive etching chemicals.
Very smooth, seamless inner surfaces reduce particle generation.
For ISO classes up to ISO 3/4, every source of particles is critical; the hot-formed Beck bends generate significantly less abrasion and turbulence than segmented metal bends. The extremely smooth, seamless surfaces minimize particle deposition and release—a critical factor for ultra-clean processes.
Use in contamination-sensitive areas (FOUP cleaning, lithography, CMP areas)
Plastic systems do not emit metal ions (Na⁺, K⁺, Fe²⁺) that would cause wafer defects in chip production—a crucial difference from metal pipe systems. This is particularly critical in lithography and chemical-mechanical polishing areas.
Energy Efficiency and System Integration
Flow-optimized geometry for energy-efficient exhaust air and scrubber systems
The extremely large exhaust air volumes (e.g., fab exhausts, dry separators, wet scrubbers) become significantly more efficient thanks to reduced pressure losses—a critical factor in 24/7 fab operations. The energy savings are substantial given the enormous air flow rates in semiconductor manufacturing.
Complete range of sizes up to very large diameters (DN 1000+) for main exhaust air and process exhausts
Semiconductor fabs require extremely high air flow rates; Beck can supply large, flow-optimized fittings that integrate precisely into complex exhaust and cleanroom designs. From individual process exhausts to central main ducts, we offer end-to-end system solutions.
More information on Beck molded parts in chip production
Why are metal-free systems important in chip production?
Even in the smallest concentrations, metal ions such as Na⁺, K⁺, or Fe²⁺ can cause wafer defects and scrap. Plastic systems do not emit such ions and thus protect highly sensitive semiconductor processes.
For which cleanroom classes are Beck components suitable?
Our seamless, smooth-walled fittings are suitable for the highest cleanroom classes up to ISO 3/4—as is standard in modern semiconductor fabs.
How is electrostatic safety ensured?
Our electrically conductive PPs-el version prevents electrostatic charges and protects sensitive electronic components. This is particularly important in areas where sensitive wafers and components are handled.
What diameters are available for Fab exhaust air?
We offer fittings up to DN 1400 and larger for central exhaust air collection ducts and main ducts. We also have the right solutions for very high airflow rates in 24/7 production.
Can Beck systems be combined with scrubbers and exhaust gas treatment systems?
Yes, our components are ideal for integration with wet scrubbers, dry scrubbers, and other exhaust gas cleaning systems. Their corrosion resistance remains intact even after intensive chemical treatment.
Are you planning exhaust air systems for cleanroom or fab areas?
Our team of experts would be happy to advise you on particle-free solutions, corrosion-resistant materials, and energy-efficient system designs for your semiconductor manufacturing.
Phone: +49-(0)69-380353-0
Fax: +49-(0)69-3808243
Email: info@beckplastic.com